Magnification Reference Standards

Magnification Reference Standards & Stage Micrometers

Geller MicroAnalytical Laboratory offers a variety of magnification reference standards (also called stage micrometers). These are patterned devices that are placed in the sample position in optical, scanning electron, and all types (STM, AFM, etc.) of scanning probe microscopes. For a discussion on magnification accuracy in the SEM click here. To see an interesting application where NIST tested their molecular measurement maching (M3) using the MRS-4 click here.

Three different devices are currently available. They are all traceable, under our ISO-17025 scope of accreditation, to national laboratories (either NPL - National Physical Laboratory in the U.K. or NIST in the U.S.A.). By mutual recognition agreements amongst the national laboratories being traceable to one laboratory is tantamount to being traceable to another.

All of our standards are "pitch" standards which means that measurements are transferable from one type of microscopy to another. Our resource guides, available below, explain this concept in detail. Just click on the links below for the PDF files.

MRS-3 is a chromium on glass standard that allows calibration from 10X to 50,000X. the overall size is 9 X 9 X 2.3 mm thick. The minimum pitch is 2 µm. All of the patterns shown below are included.

MRS-4 is a chromium on glass standard that allows calibration from 10X to 200,000X. the overall size is 9 X 9 X 2.3 mm thick. The minimum pitch is 1/2 µm.

MRS-Cert of Measurement Check out our improved data with reduced uncertainties for the MRS-3 and MRS-4.
MRS traceability information Certification measurement locations, re-certification & cleaning information for the MRS-3 and MRS-4

MRS-5 (resource guide) is a tungsten on silicon standard that allows calibration from about 1,000X to 1,000,000X. with an uncertainty of 3nm! The minimum pitch is 80 nm! The link has an AFM image of the 80 nm pitch pattern from the National Physical Laboratory.

MRS-5 Certificate of Measurement & Traceability Information with all the details you want to know

Micro-Ruler is a chromium on glass standard that has a 150 mm long scale with 0.010 mm increments. Accuracy is +/- 2.5 µm over it's length.

Retainers for the MRS-3 and MRS-4

MRS SEM/R -------------------- MRS OMR

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Magnification Reference Standards & Stage Micrometers

MRS-3 is a chromium on glass standard that allows calibration from 10X to 50,000X. the overall size is 9 X 9 X 2.3 mm thick. The minimum pitch is 2 µm. All of the patterns shown below are included.

MRS-4 is a chromium on glass standard that allows calibration from 10X to 200,000X. the overall size is 9 X 9 X 2.3 mm thick. The minimum pitch is 1/2 µm.

MRS-Cert of Measurement Check out our improved data with reduced uncertainties for the MRS-3 and MRS-4. MRS traceability information Certification measurement locations, re-certification & cleaning information for the MRS-3 and MRS-4

MRS-5 (resource guide) is a tungsten on silicon standard that allows calibration from about 1,000X to 1,000,000X. with an uncertainty of 3nm! The minimum pitch is 80 nm! The link has an AFM image of the 80 nm pitch pattern from the National Physical Laboratory.

MRS-5 Certificate of Measurement & Traceability Information with all the details you want to know

Micro-Ruler is a chromium on glass standard that has a 150 mm long scale with 0.010 mm increments. Accuracy is +/- 2.5 µm over it's length.

Retainers for the MRS-3 and MRS-4

MRS-Cert of Measurement Check out our improved data with reduced uncertainties for the MRS-3 and MRS-4.
MRS traceability information Certification measurement locations, re-certification & cleaning information for the MRS-3 and MRS-4